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Thin-Film Coating and Surface Treatment

Vacuum Coating

Turn-Key Solutions – for High Performance Solar Cells

GENERIS PVD – Inline Sputtering System with Horizontal Substrate Transport

GENERIS PVD for Hydrogen

GENERIS PET – Passivated Edge Technology

Generis PECVD – System for Plasma-enhanced CVD (PECVD) Processes

HISTARIS PVD – Inline Sputtering System with Horizontal Substrate Transport for Glass

VISTARIS PVD– Inline Sputtering  System with Vertical Substrate Transport

SELENIUS – Processing Systems for Evaporation of CIGS Thin-Film Solar Cells

Deposition Systems (PVD & PECVD) for R&D and Pilot Production

POLYCOATER – Inline Sputtering Machine for Metallization of 3D Parts

DECOLINE II with Integrated Lacquering System

CISARIS X3 Selenization/Sulphurization with High-End Rapid Thermal Process

CSS – Close Spaced Sublimation (CSS) for the Production of CdTe Solar Modules

EVARIS – Horizontal Inline Vacuum Evaporation System

Semiconductor

TIMARIS – Semiconductor Cluster Tool

TIMARIS – Overview Modules

TIMARIS – System Platform

Wet Processing

IMPEDIO – R2R Wet Chemistry System

SILEX III – Batch System for High Performance Solar Cells

SILEX BPP – Inline Wet Processing System

MEDLINE – Cleaning & Deposition of Medical Products

GERULUS – Wafer Block Pre-Clean & Deglue System

MATERIA – Advanced Cleaning of Silicon

Lacquering

PAINTLINE Inline Lacquering System for 3D Parts

PAINTLINE Compact
Lacquering Systems for 3D Parts

DECOLINE II with Integrated Lacquering System

Turn-Keys Solution

Turn-Key Solutions – for High Performance Solar Cells

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