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By enabling a wide variety of applications for industry and academia, we enable building their digital future.
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Our nanofabrication solutions pave the way from breakthrough innovations and rapid prototyping to volume production of nanotechnology devices.
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Our unique combination of high-precision writing, imaging and analysis tools is designed to meet the most demanding requirements in the field, providing unparalleled precision and efficiency.
Electron Beam Lithography
Focused Ion Beams
Laser Lithography
Imaging & Analysis
Explore Electron Beam Lithography, the crucial technology for generating nanostructures essential in shaping tomorrow’s devices, particularly in semiconductors, optoelectronics, and quantum technologies
Product Overview
EBPG
Highest throughput, automation, and precision
VOYAGER
High performance for shortest time to result
Pioneer | E-LINE | Raith150
Multifunctional system family for maximum versatility
ELPHY
Upgrade kit for SEM or
FIB-SEM
Experience Ion Beams across various fields with our FIB-SEM Nanofabrication, Ion Microscopy, and SIMS Nanoanalytics systems
Product Overview
Velion
Multi ion species FIB‑SEM
IONMASTER
SIMS analysis for high‑resolution nm-scale elemental mapping
ELPHY
Upgrade kit for SEM or FIB-SEM
Discover Laser Lithography with multi-beam technology for enhanced throughput and scalable resolution, or choose single-beam systems with unmatched lateral and gray-level resolutions
Product Overview
PICOMASTER
Direct laser writers with ultimate resolution
Picomaster XF
Highest-throughput grayscale lithography
ATHOS
Light-years ahead in optical security and holographic packaging
Explore precise imaging and analysis tools for enhanced understanding and progress, offering a wide range of capabilities - from large-area 3D imaging to comprehensive process control and extensive material analysis.
Product Overview
Chipscanner
Large-area 3D SEM imaging
IONMASTER
SIMS analysis for high‑resolution nm-scale elemental mapping
VECTOR
AI-powered inspection and metrology
Electron Beam Lithography
EBPG
VOYAGER
Pioneer | E-LINE | Raith150
ELPHY
Focused Ion Beams
Velion
IONMASTER
ELPHY
Laser
PICOMASTER
Picomaster XF
ATHOS
Imaging & Analysis
IONMASTER
CHIPSCANNER
VECTOR
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We continually push the boundaries of nanotechnology, a commitment we take very seriously. Over the past four decades, our intense focus and dedication have led to numerous groundbreaking innovations.
Exploring the depths of nanotechnology.
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Optical Telecommunication
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